TXRF

Q: Do you need calibration standards?

TXRF commonly uses an internal standard approach. For strict compliance or absolute accuracy requirements, calibration strategy and QC requirements can be defined per project.

What is TXRF?

TXRF (Total Reflection X-Ray Fluorescence) is an ultra-trace elemental analysis technique that measures elemental composition using X-ray fluorescence under total reflection geometry. By directing X-rays at a very small incident angle onto a smooth substrate, TXRF significantly reduces background scattering, enabling highly sensitive detection of trace metals and other elements.

TXRF is widely used for semiconductor contamination control, high-purity chemicals, and surface/solution trace metal screening, where low detection limits and multi-element capability are critical.

What TXRF Can Help You Solve

Ultra-trace metal contamination screening (multi-element in a single run)
Incoming QC for high-purity chemicals, process solutions, and rinses
Process monitoring for contamination control (before/after filtration, cleaning, tool maintenance)
Root-cause investigation for yield loss linked to trace metals
Supplier comparison and batch-to-batch consistency checks
Baseline monitoring of UPW or specialty chemicals (project-dependent)

Typical Applications

Semiconductor manufacturing: wafer/process chemical contamination control and monitoring
Electronics & display: high-clean materials and process liquids screening
High-purity chemicals: acids, solvents, etchants, plating solutions (matrix dependent)
Environmental & water samples (project-dependent): trace metal screening
R&D and QA: rapid multi-element impurity checks for new materials and processes

Capabilities & What You Receive

Measurement Capabilities

Multi-element analysis (many metals and selected non-metals; matrix-dependent)
Ultra-trace detection enabled by low background (detection limits depend on element and matrix)
Small sample requirement with fast screening turnaround (project-dependent)
Internal standard approach for improved comparability (common TXRF practice)

Deliverables

Results table listing detected elements with concentrations (e.g., µg/L (ppb) for liquids)
Spectra and peak identification summary (as needed)
QC notes (blank/standard checks, recoveries—project dependent)
Pass/fail vs your specification (if provided)
Comparison across batches/suppliers (optional)

Sample Requirements

Sample types: high-purity liquids, process solutions, rinses, digests (project dependent)
Typical volume: often a few mL is sufficient; actual use per replicate is small
Containers: clean, metal-free bottles (pre-cleaned if possible); avoid glass/metal caps when trace metals are critical
Handling: minimize contamination; provide blanks if possible (UPW or matrix blank)
Information to provide: sample matrix, expected concentration range, target elements, required spec limits, and SDS for hazardous chemicals

Workflow

Requirement review (matrix, target elements, detection needs, spec limits)
Sample handling plan (containers, blanks, internal standard strategy)
Sample preparation (dilution/acidification or digestion if needed; droplet deposition on substrate)
TXRF measurement and spectral acquisition
Data processing (peak ID, quant calculation, QC checks)
Reporting (results + conditions + pass/fail/comparison)

FAQs

How is TXRF different from ICP-MS?

TXRF is a fast, multi-element screening method with minimal sample consumption and low background. ICP-MS generally offers broader elemental coverage and lower detection limits for many elements, especially with optimized digestion and calibration. We can recommend the best method based on matrix and targets.