XPS-ESCA
What is XPS / ESCA?
XPS (X-ray Photoelectron Spectroscopy)—also known as ESCA (Electron Spectroscopy for Chemical Analysis)—is a surface analysis technique that measures the elemental composition and chemical bonding states of the top ~1–10 nm of a material. XPS irradiates a sample with X-rays and detects emitted photoelectrons; the electron energies reveal which elements are present and their chemical states (e.g., oxidation state, bonding environment).
XPS/ESCA is widely used for surface contamination analysis, adhesion and coating studies, corrosion/oxidation evaluation, thin film chemistry, and process verification, especially where surface chemistry controls performance.
What XPS / ESCA Can Help You Solve
Surface contamination identification (organics, silicones, fluorinated residues, ionic species)
Chemical state analysis (oxidation states, bonding changes, functional groups indicators)
Adhesion / delamination investigations (weak boundary layers, surface treatments, residues)
Oxidation and corrosion studies (metal oxides/hydroxides, passivation quality)
Thin film and coating surface chemistry verification (treatments, primers, plasma effects)
Comparative studies (before/after cleaning, processing, aging, environmental exposure)
Typical Applications
Semiconductor & electronics: surface residues, plasma/clean effects, thin film chemistry checks
Metals & corrosion: oxide thickness trends (semi-quant), passivation/cleanliness verification
Polymers & adhesives: surface treatments (plasma/corona), additive migration, bonding failures
Coatings & paints: surface composition, contamination, weathering effects
Batteries & energy materials: surface films and chemistry changes (project-dependent)
Medical/industrial devices: surface cleanliness and treatment verification (project-dependent)
Capabilities & What You Receive
Core Measurements
Survey scan: elemental composition screening (atomic % for detected elements)
High-resolution scans: chemical state/bonding information for selected elements (e.g., C 1s, O 1s, N 1s, Si 2p, F 1s, metals)
Quantitative surface composition: atomic % within XPS sampling depth (semi-quantitative; sensitivity factors applied)
Angle-resolved XPS (optional): near-surface vs slightly deeper comparison (availability dependent)
Depth profiling (optional): sputter-assisted composition vs depth (destructive; project-dependent)
XPS mapping / imaging (optional): spatial distribution (project-dependent)
Deliverables
Survey spectrum and identified elements list
Atomic % table and interpretation notes
High-resolution spectra with peak fitting (when requested) and chemical state assignments
Optional: depth profile plots and/or maps
Clear conclusions and comparison summary (sample A vs B, before vs after)
Sample Requirements
Sample types: flat solids, films, coated coupons, metals, polymers, ceramics; small components possible if mountable
Surface condition: clean and dry; avoid fingerprints, tape residue, and dust
Size: typically small pieces fit the sample holder; flatness helps data quality
Vacuum compatibility: samples must be stable under high vacuum (provide SDS if needed)
Reference/control sample: strongly recommended for contamination and process comparison
Information to provide: target question (contamination? oxidation state? treatment verification?), expected materials, and any areas of interest
Workflow
Requirement review (survey only vs high-res/fit; depth profile; mapping; acceptance criteria)
Sample handling & mounting (clean handling procedures)
Measurement (survey + targeted high-resolution scans; optional profiling/mapping)
Data processing (element ID, quantification, peak fitting, chemical state interpretation)
Comparison (defect vs non-defect, before vs after, sample A vs B)
Report delivery (spectra + tables + conclusions + recommended next steps)
FAQs
How deep does XPS analyze?
XPS is surface sensitive, typically sampling the top ~1–10 nm depending on material and electron energies.
Can XPS detect hydrogen or measure very thick films?
XPS cannot detect hydrogen. For thick films, XPS reports surface chemistry only; bulk composition may require FTIR, ICP, or combustion analysis depending on needs.
Is XPS quantitative?
XPS provides semi-quantitative atomic % for the surface region. Absolute accuracy depends on matrix effects, surface roughness, and charging; it is excellent for comparison and trend analysis.
What’s the difference between XPS and TOF-SIMS?
XPS excels at chemical states and quantitative surface composition. TOF-SIMS is more sensitive to molecular fragments and trace organics/ions and provides higher-resolution chemical imaging. They are often complementary.
Will XPS damage my sample?
Standard XPS is minimally destructive, though prolonged X-ray exposure can affect very sensitive polymers. Depth profiling is destructive in the analyzed area due to sputtering.
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