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EELS

What Is EELS?

EELS measures the energy lost by electrons as they pass through a thin specimen in a TEM. This energy loss corresponds to specific electronic transitions within the material, allowing identification of:

  • elemental composition

  • chemical bonding environment

  • oxidation and valence states

  • local electronic structure

Because EELS is performed at high spatial resolution, it enables site-specific chemical analysis at nanometer or even sub-nanometer scales.

What EELS Measures

EELS provides detailed information on:

  • Elemental identification, including light elements such as B, C, N, O, and Li

  • Chemical bonding and coordination

  • Oxidation state and valence changes

  • Electronic structure and local chemistry variations

  • Composition across interfaces, grain boundaries, and defects

These capabilities make EELS complementary to EDS, especially when light elements or chemical state information is critical.

Why Use EELS?

EELS is selected when conventional techniques cannot fully answer key questions, such as:

  • Are light elements present, and where are they located?

  • How does oxidation state change across an interface?

  • Is there chemical bonding variation at grain boundaries or defects?

  • What is the chemistry of ultra-thin layers or reaction zones?

  • How does nanoscale chemistry relate to performance or failure?

EELS provides insight into why materials behave the way they do, not just what elements are present.

Typical Application Scenarios

Interfaces & Thin Films

  • Chemical analysis across multilayer interfaces

  • Diffusion and reaction layer characterization

  • Oxidation or reduction at interfaces

Nanomaterials & Advanced Materials

  • Chemical state analysis of nanoparticles

  • Core–shell and gradient structures

  • Light-element distribution in nanostructures

Semiconductors & Electronic Materials

  • Dopant and light-element analysis

  • Interface chemistry in devices

  • Degradation and reliability studies

Battery & Energy Materials

  • Local chemistry of electrodes and interfaces

  • Oxidation state changes during cycling

  • Light-element behavior (e.g., Li-containing systems)

Failure Analysis

  • Chemical changes at crack tips or defects

  • Oxidation, contamination, or reaction products

  • Comparison of “good vs. failed” regions at the nanoscale

Sample Requirements

EELS requires electron-transparent specimens, typically prepared by methods such as FIB thinning or ion milling. Suitable samples include:

  • thin films and multilayers

  • nanoparticles and powders (properly dispersed)

  • cross-sections of devices or components

  • interfaces and localized regions of interest

Xinbodi evaluates sample feasibility and preparation strategy based on material type and analytical goals.

What You Will Receive

Each EELS project is delivered with a clear, structured report designed to support technical decision-making. A typical deliverable includes:

  • project objective and sample description

  • EELS acquisition conditions and analysis approach

  • elemental and chemical state spectra

  • nanoscale chemical maps (when applicable)

  • comparison across regions, layers, or samples

  • interpretation linking chemistry to structure and performance

  • recommendations for follow-up analysis or process optimization

Why Choose Xinbodi for EELS?

  • Expertise in nanoscale chemical and interface analysis

  • Integrated TEM-based analytical workflows

  • Strong experience with light elements and chemical state interpretation

  • Clear, application-driven reporting

  • Support for R&D, reliability studies, and failure investigations

  • Strict confidentiality for proprietary samples and data

FAQs

EDS provides elemental composition, mainly for heavier elements. EELS offers higher sensitivity to light elements and provides chemical bonding and oxidation state information.

EELS requires thin sample preparation and electron beam exposure, which is destructive to the analyzed region, but it enables unmatched nanoscale chemical insight.

Yes. EELS is commonly combined with high-resolution TEM or STEM imaging to correlate structure and chemistry.

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